SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Formation of a deposit on workpiece surface in polishing nonmetallic materials
Filatov, Yu. D., Monteil, G., Sidorko, V. I., Filatov, O. Y., Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, MonikaVolume:
8763
Year:
2013
Language:
english
DOI:
10.1117/12.2016913
File:
PDF, 740 KB
english, 2013