SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble,...

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SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - Measurement of the 1/f noise of lateral actuated MEMS with sidewall piezoresistors

Stavrov, Vladimir, Kohl, Franz, Sauter, Thilo, Philipov, Philip, Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, Monika
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Volume:
8763
Year:
2013
Language:
english
DOI:
10.1117/12.2017427
File:
PDF, 507 KB
english, 2013
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