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SPIE Proceedings [SPIE Microelectronic Manufacturing '95 - Austin, TX (Wednesday 25 October 1995)] Microelectronic Device and Multilevel Interconnection Technology - In-line LOCOS active width characterization using surface SEM
Madan, Sudhir K., Holloway, Tom, Chen, Ih-Chin, Dixit, Girish A., Doan, Trung T., Sasaki, NobuoVolume:
2636
Year:
1995
Language:
english
DOI:
10.1117/12.221135
File:
PDF, 535 KB
english, 1995