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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Microlithography and Metrology in Micromachining - 1/N Feynman machines as a path to ultraminiaturization
Teague, E. Clayton, Postek, Michael T.Volume:
2640
Year:
1995
Language:
english
DOI:
10.1117/12.222635
File:
PDF, 259 KB
english, 1995