SPIE Proceedings [SPIE International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics - Kiev, Ukraine (Thursday 11 May 1995)] International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics - Inverse problem solution in ellipsometry
Zabashta, Lubov A., Zabashta, Oleg I., Svechnikov, Sergey V., Valakh, Mikhail Y.Volume:
2648
Year:
1995
Language:
english
DOI:
10.1117/12.226157
File:
PDF, 194 KB
english, 1995