SPIE Proceedings [SPIE Lasers, Optics, and Vision for Productivity in Manufacturing I - Besancon, France (Monday 10 June 1996)] Micro-Optical Technologies for Measurement, Sensors, and Microsystems - High-resolution heterodyne interferometric rotation encoder with frequency-modulated laser diode
Drabarek, Pawel, van Keulen, Michael, Kuehnle, Goetz, Steinlechner, Siegbert, Parriaux, Olivier M.Volume:
2783
Year:
1996
Language:
english
DOI:
10.1117/12.248489
File:
PDF, 403 KB
english, 1996