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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachining and Microfabrication Process Technology III - Ion sputter deposition of shape memory alloy films for microactuators
Davies, Sam T., Tsuchiya, Kazuyoshi, Chang, Shih-Chia, Pang, Stella W.Volume:
3223
Year:
1997
Language:
english
DOI:
10.1117/12.284477
File:
PDF, 731 KB
english, 1997