SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Microelectronic Device Technology II - Yield management by threshold voltage adjustment in back-end process
Ito, Shinya, Noguchi, Ko, Horiuchi, Tadahiko, Burnett, David, Wristers, Dirk, Tsuchiya, ToshiakiVolume:
3506
Year:
1998
Language:
english
DOI:
10.1117/12.323965
File:
PDF, 292 KB
english, 1998