SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Materials and Device Characterization in Micromachining - Multilevel microstructure fabrication using single-step 3D photolithography and single-step electroplating
Yoon, Jun-Bo, Lee, Jae-Duk, Han, Chul-Hi, Yoon, Euisik, Kim, Choong-Ki, Friedrich, Craig R., Vladimirsky, YuliVolume:
3512
Year:
1998
Language:
english
DOI:
10.1117/12.324080
File:
PDF, 2.83 MB
english, 1998