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SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Mass separation using thin PTFE membranes
Rummler, Zeno, Bacher, Walter, Saile, Volker, Schomburg, Werner K., Courtois, Bernard, Crary, Selden B., Ehrfeld, Wolfgang, Fujita, Hiroyuki, Karam, Jean Michel, Markus, Karen W.Volume:
3680
Year:
1999
Language:
english
DOI:
10.1117/12.341170
File:
PDF, 3.56 MB
english, 1999