SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Optical Microlithography XII - Experimental comparison of off-axis illumination and imaging interferometric lithography
Chen, Xiaolan, Brueck, Steven R. J., Van den Hove, LucVolume:
3679
Year:
1999
Language:
english
DOI:
10.1117/12.354390
File:
PDF, 4.98 MB
english, 1999