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SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Advances in Resist Technology and Processing XVII - Comparison of methods for acid quantification: impact of resist components on acid-generating efficiency
Cameron, James F., Fradkin, Leslie, Moore, Kathryn, Pohlers, Gerd, Houlihan, Francis M.Volume:
3999
Year:
2000
Language:
english
DOI:
10.1117/12.388302
File:
PDF, 525 KB
english, 2000