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SPIE Proceedings [SPIE 4th International Conference on Thin Film Physics and Applications - Shanghai, China (Monday 8 May 2000)] Fourth International Conference on Thin Film Physics and Applications - Low-temperature preparation of highly (001)-oriented PZT thin films on Pt/Ti/SiO2/Si using LaNiO3 as a buffer layer
Meng, Xiangjian, Sun, Jinglan, Wang, Genshui, Yu, Jian, Guo, Shaoling, Chu, Junhao, Chu, Junhao, Liu, Pulin, Chang, YongVolume:
4086
Year:
2000
Language:
english
DOI:
10.1117/12.408349
File:
PDF, 1.15 MB
english, 2000