![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Cannes-Mandelieu, France (Wednesday 25 April 2001)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Design of a new in-plane microactuator for airflow control applications
de Labachelerie, Michel, Bastien, Fransois, Edouard, C., Courtois, Bernard, Karam, Jean Michel, Levitan, Steven P., Markus, Karen W., Tay, Andrew A. O., Walker, James A.Volume:
4408
Year:
2001
Language:
english
DOI:
10.1117/12.425366
File:
PDF, 613 KB
english, 2001