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SPIE Proceedings [SPIE Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Cannes-Mandelieu, France (Wednesday 25 April 2001)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Numerical approach for the frequency-shifting analysis of electrostatic micromechanical actuator
Kwon, Kie-Chan, Lee, Wan-Sul, Kim, Bong-Kyu, Cho, Ji-Hyon, Youn, Sung Kie, Courtois, Bernard, Karam, Jean Michel, Levitan, Steven P., Markus, Karen W., Tay, Andrew A. O., Walker, James A.Volume:
4408
Year:
2001
Language:
english
DOI:
10.1117/12.425385
File:
PDF, 459 KB
english, 2001