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SPIE Proceedings [SPIE ECO4 (The Hague '91) - The Hague, Netherlands (Monday 11 March 1991)] Micro-Optics II - Fabrication of light-guiding devices and fiber-coupling structures by the LIGA process
Rogner, Arnd, Ehrfeld, Wolfgang, Verga Scheggi, Anna M.Volume:
1506
Year:
1991
Language:
english
DOI:
10.1117/12.45961
File:
PDF, 738 KB
english, 1991