SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Nano- and Microtechnology: Materials, Processes, Packaging, and Systems - Investigation of Pt/Ga2O3 -ZnO/SiC Schottky-diode-based hydrocarbon gas sensors

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