SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Emerging Lithographic Technologies VI - Cost of ownership analysis for patterning using step and flash imprint lithography
Sreenivasan, S. V., Willson, C. Grant, Schumaker, Norman E., Resnick, Douglas J., Engelstad, Roxann L.Volume:
4688
Year:
2002
Language:
english
DOI:
10.1117/12.472275
File:
PDF, 154 KB
english, 2002