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SPIE Proceedings [SPIE SPIE's 27th Annual International Symposium on Microlithography - Santa Clara, CA (Sunday 3 March 2002)] Metrology, Inspection, and Process Control for Microlithography XVI - New AFM imaging for an inline LSI process monitor
Hosaka, Sumio, Morimoto, Takafumi, Kuroda, Hiroshi, Minomoto, Yasushi, Kembo, Yukio, Koyabu, Hirokazu, Herr, Daniel J. C.Volume:
4689
Year:
2002
Language:
english
DOI:
10.1117/12.473488
File:
PDF, 808 KB
english, 2002