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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Reliability, Testing, and Characterization of MEMS/MOEMS II - Burn-in test reduction for the Digital Micromirror Device (DMD)
Hogan, Timothy J., Barker, Paul, Douglass, Michael R., Ramesham, Rajeshuni, Tanner, Danelle M.Volume:
4980
Year:
2003
Language:
english
DOI:
10.1117/12.478211
File:
PDF, 110 KB
english, 2003