SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, California, USA (Sunday 3 August 2003)] Nano- and Micro-Optics for Information Systems - Stiction problems in releasing 3D microstructures and the solution
Wu, Dongmin, Eldada, Louay A., Fang, Nicholas, Sun, Cheng, Zhang, XiangVolume:
5225
Year:
2003
Language:
english
DOI:
10.1117/12.506644
File:
PDF, 427 KB
english, 2003