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SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Device and Process Technologies for MEMS, Microelectronics, and Photonics III - Determination of residual stress in low-temperature PECVD silicon nitride thin films
Martyniuk, Mariusz P., Antoszewski, Jarek, Musca, Charles A., Dell, John M., Faraone, Lorenzo, Chiao, Jung-Chih, Hariz, Alex J., Jamieson, David N., Parish, Giacinta, Varadan, Vijay K.Volume:
5276
Year:
2004
Language:
english
DOI:
10.1117/12.523327
File:
PDF, 503 KB
english, 2004