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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] Micromachining Technology for Micro-Optics and Nano-Optics II - Si3N4-based photonic crystal membranes
Ilias, Samir S., Bourliguet, Bruno, Pare, Claude, Paquet, Alex, Alain, Christine, Jerominek, Hubert, Johnson, Eric G., Nordin, Gregory P.Volume:
5347
Year:
2003
Language:
english
DOI:
10.1117/12.530314
File:
PDF, 2.09 MB
english, 2003