SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Surface micro-structuring of silica glass by laser-induced backside wet etching using ns-pulsed UV lasers: application into micropatterning of functional materials using self-assembled monolayers
Niino, Hiroyuki, Ding, Ximing, Kawaguchi, Yoshizo, Sato, Tadatake, Narazaki, Aiko, Kurosaki, Ryozo, Miyamoto, Isamu, Helvajian, Henry, Itoh, Kazuyoshi, Kobayashi, Kojiro F., Ostendorf, Andreas, SugiokYear:
2012
Language:
english
DOI:
10.1117/12.595707
File:
PDF, 652 KB
english, 2012