SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Influence of experimental environment on the process of photo-assisted electrochemical etching process on silicon
Chen, Yu, Guo, Pingsheng, Wang, Lianwei, Chu, Junhao, Lai, Zongsheng, Wang, Lianwei, Xu, ShaohuiYear:
2012
Language:
english
DOI:
10.1117/12.607809
File:
PDF, 304 KB
english, 2012