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SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2005 - Sevilla, Spain (Monday 9 May 2005)] Smart Sensors, Actuators, and MEMS II - Nanocrystalline Bi4Ti3O12 thin film for pressure sensor
Wei, Chong C., Yahaya, Muhammad, Mat Salleh, Muhamad, Cane, Carles, Chiao, Jung-Chih, Vidal Verdu, FernandoVolume:
5836
Year:
2005
Language:
english
DOI:
10.1117/12.608444
File:
PDF, 408 KB
english, 2005