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SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Optical Microlithography XVIII - ILSim: a compact simulation tool for interferometric lithography
Fan, Yongfa, Smith, Bruce W., Bourov, Anatoly, Zavyalova, Lena, Zhou, Jianming, Estroff, Andrew, Lafferty, Neal, Smith, Bruce W.Volume:
5754
Year:
2005
Language:
english
DOI:
10.1117/12.621286
File:
PDF, 239 KB
english, 2005