SPIE Proceedings [SPIE Congress on Optics and Optoelectronics - Warsaw, Poland (Sunday 28 August 2005)] Integrated Optics: Theory and Applications - Deep lithography with protons to prototype pluggable micro-optical out-of-plane coupling structures for multimode waveguides
Van Erps, Jürgen, Pustelny, Tadeusz, Lambeck, Paul V., Van Steenberge, Geert, Hendrickx, Nina, Gorecki, Christophe, Geerinck, Peter, Volckaerts, Bart, Debaes, Christof, Van Daele, Peter, Thienpont, HuVolume:
5956
Year:
2005
Language:
english
DOI:
10.1117/12.623143
File:
PDF, 1.05 MB
english, 2005