SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] Micromachining and Microfabrication Process Technology XI - Development of fabrication techniques for high-density integrated MIM capacitors in power conversion equipment
Brunet, M., Dubreuil, P., Scheid, E., Sanchez, J-L., Maher, Mary-Ann, Stewart, Harold D., Chiao, Jung-ChihVolume:
6109
Year:
2006
Language:
english
DOI:
10.1117/12.646121
File:
PDF, 434 KB
english, 2006