SPIE Proceedings [SPIE 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies - Xian, China (Wednesday 2 November 2005)] 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment - A microoptical scanner
Huang, Ying, Hou, Xun, Yuan, Jiahu, Chen, Sihai, Xiang, Sihua, Wyant, James C., Wang, Hexin, Yi, Xinjian, Han, SenVolume:
6150
Year:
2005
Language:
english
DOI:
10.1117/12.676532
File:
PDF, 314 KB
english, 2005