SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, California, United States (Saturday 20 January 2007)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI - On the reliability of thermopneumatic actuators with silicon membranes
Henning, Albert K., Hartzell, Allyson L., Ramesham, RajeshuniVolume:
6463
Year:
2007
Language:
english
DOI:
10.1117/12.697818
File:
PDF, 592 KB
english, 2007