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SPIE Proceedings [SPIE MOEMS-MEMS 2008 Micro and Nanofabrication - San Jose, CA (Saturday 19 January 2008)] Micromachining and Microfabrication Process Technology XIII - Three dimensional waveguide fabrication in PMMA using femtosecond laser micromachining system
Uppal, Nitin, Maher, Mary-Ann, Chiao, Jung-Chih, Shiakolas, Panos S., Rizwan, Mohsin, Resnick, Paul J.Volume:
6882
Year:
2008
Language:
english
DOI:
10.1117/12.763824
File:
PDF, 782 KB
english, 2008