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SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 10 August 2008)] Two- and Three-Dimensional Methods for Inspection and Metrology VI - High dynamic range scanning technique
Huang, Peisen S., Zhang, Song, Yau, Shing-Tung, Yoshizawa, Toru, Harding, Kevin G.Volume:
7066
Year:
2008
Language:
english
DOI:
10.1117/12.791265
File:
PDF, 1.03 MB
english, 2008