SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Laser applications in the field of MEMS
Moagar-Poladian, Gabriel M., Illyefalvi-Vitez, Zsolt, Balogh, Balint, Ulieru, Dumitru, Coraci, Antonie, Udrea, MirceaYear:
2012
Language:
english
DOI:
10.1117/12.801970
File:
PDF, 284 KB
english, 2012