SPIE Proceedings [SPIE 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies - Dalian, China (Monday 26 April 2010)] 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems - Design and simulation of microspectrometer based on torsional MEMS grating
Yan, Bin, Ye, Tianchun, Han, Sen, Yuan, Weizheng, Sun, Ruikang, Kameyama, Masaomi, Hu, Song, Qiao, Dayong, Yu, Yiting, Li, TaipingVolume:
7657
Year:
2010
Language:
english
DOI:
10.1117/12.867905
File:
PDF, 306 KB
english, 2010