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SPIE Proceedings [SPIE Cambridge Symposium-Fiber/LASE '86 - Cambridge, MA (Monday 18 August 1986)] Integrated Optical Circuit Engineering IV - Characterization Of Ti In-Diffused Waveguides Using Secondary Ion Mass Spectrometry (SIMS) And Electron Microprobe Analysis (EMPA)
Leone, E. A., Signorelli, A. J., Sriram, S., Vohralik, P., Mentzer, Mark A., Sriram, SriramVolume:
704
Year:
1987
Language:
english
DOI:
10.1117/12.937203
File:
PDF, 4.69 MB
english, 1987