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SPIE Proceedings [SPIE 1984 Los Angeles Techincal Symposium - Los Angeles (Tuesday 24 January 1984)] Laser-Assisted Deposition, Etching, and Doping - Laser Photolysis And Ionization Of Polyatomic Molecules: Film Growth And Spectroscopic Diagnostics
Eden, J G., Osmundsen, J. F., Abele, C C., Geohegan, D B., Allen, Susan D.Volume:
459
Year:
1984
Language:
english
DOI:
10.1117/12.939430
File:
PDF, 250 KB
english, 1984