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SPIE Proceedings [SPIE 1988 Microlithography Conferences - Santa Clara, CA (Wednesday 2 March 1988)] Integrated Circuit Metrology, Inspection, and Process Control II - Reliable Automatic Measurements Of Critical Dimensions Using S.E.M.
Martin, Herve, Burlet, Daniel, Bataillon, Jean L., Latombe, Bruno, Monahan, Kevin M.Volume:
921
Year:
1988
Language:
english
DOI:
10.1117/12.968386
File:
PDF, 176 KB
english, 1988