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Silicon Nanocolumns on Nanosphere Lithography Templated Substrates: Effects of Sphere Size and Substrate Temperature
Patzig, Christian, Fuhrmann, Bodo, Leipner, Hartmut S., Rauschenbach, BerndVolume:
9
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2009.367
Date:
March, 2009
File:
PDF, 2.41 MB
english, 2009