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SiC sedimentation and carbon migration in mc-Si by election beam melting with slow cooling pattern
Qin, Shiqiang, Jiang, Dachuan, Li, Pengting, Shi, Shuang, Guo, Xiaoliang, An, Guangye, Tan, YiVolume:
53
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2016.06.002
Date:
October, 2016
File:
PDF, 1.62 MB
english, 2016