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ZnO film deposition by DC magnetron sputtering: Effect of target configuration on the film properties

Arakelova, E., Khachatryan, A., Kteyan, A., Avjyan, K., Grigoryan, S.
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.06.030
Date:
June, 2016
File:
PDF, 788 KB
english, 2016
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