High-power gas-discharge excimer ArF, KrCl, KrF and XeCl...

High-power gas-discharge excimer ArF, KrCl, KrF and XeCl lasers utilising two-component gas mixtures without a buffer gas

Razhev, A M, Kargapol'tsev, E S, Churkin, D S
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Volume:
46
Language:
english
Journal:
Quantum Electronics
DOI:
10.1070/QEL15991
Date:
March, 2016
File:
PDF, 567 KB
english, 2016
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