[IEEE 2007 IEEE Industry Applications Annual Meeting - New Orleans, LA, USA (2007.09.23-2007.09.27)] 2007 IEEE Industry Applications Annual Meeting - Effect of Charge Injection Due to ESD on the Operation of MEMS
Greason, William D.Year:
2007
Language:
english
DOI:
10.1109/ias.2007.331
File:
PDF, 149 KB
english, 2007