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SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Interferometry: Surface Characterization and Testing - Rapid surface roughness measurements of coarse objects
Pike, John N., Creath, Katherine, Greivenkamp, John E.Volume:
1776
Year:
1992
Language:
english
DOI:
10.1117/12.139243
File:
PDF, 1.29 MB
english, 1992