SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Interferometry: Surface Characterization and Testing - Surface defect analysis of semiconductor materials and devices using nanoscopy techniques
Montaner, Denis, Montgomery, Paul C., Andre, Eric, Creath, Katherine, Greivenkamp, John E.Volume:
1776
Year:
1992
Language:
english
DOI:
10.1117/12.139244
File:
PDF, 508 KB
english, 1992