SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography - Multilayer thin-film design as far-ultraviolet quarterwave retarders
Kim, Jongmin, Zukic, Muamer, Torr, Douglas G., McColgan, Michele W., Hoover, Richard B., Walker II, Arthur B. C.Volume:
1742
Year:
1993
Language:
english
DOI:
10.1117/12.140574
File:
PDF, 560 KB
english, 1993