SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography - VETA x-ray data acquisition and control system
Brissenden, Roger J. V., Jones, Mark T., Ljungberg, Malin, Nguyen, Dan T., Roll, Jr., John B., Hoover, Richard B., Walker II, Arthur B. C.Volume:
1742
Year:
1993
Language:
english
DOI:
10.1117/12.140599
File:
PDF, 385 KB
english, 1993