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SPIE Proceedings [SPIE SPIE's 1994 Symposium on Microlithography - San Jose, CA (Sunday 27 February 1994)] Optical/Laser Microlithography VII - Comparison of phase-shift mask types for submicrometer contact hole definition
Cui, Zheng, Martin, Brian, Prewett, Philip D., Johnson, Steve, Herman, Philip, Brunner, Timothy A.Volume:
2197
Year:
1994
Language:
english
DOI:
10.1117/12.175420
File:
PDF, 394 KB
english, 1994