SPIE Proceedings [SPIE SPIE's 1994 Symposium on Microlithography - San Jose, CA (Sunday 27 February 1994)] Optical/Laser Microlithography VII - Multiple-exposure interferometric lithography
Zaidi, Saleem H., Brueck, Steven R. J., Brunner, Timothy A.Volume:
2197
Year:
1994
Language:
english
DOI:
10.1117/12.175478
File:
PDF, 377 KB
english, 1994