SPIE Proceedings [SPIE SPIE's 1994 Symposium on Microlithography - San Jose, CA (Sunday 27 February 1994)] Optical/Laser Microlithography VII - Optimization of optical properties for single-layer halftone masks
Ito, Shinichi, Hazama, Hiroaki, Kamo, Takashi, Miyazaki, Hideya, Sato, Hiroyuki, Hayashi, Kenji, Shigemitsu, Fumiaki, Mori, Ichiro, Brunner, Timothy A.Volume:
2197
Year:
1994
Language:
english
DOI:
10.1117/12.175486
File:
PDF, 406 KB
english, 1994